Design, fabrication, and characterization of a planar, silicon-based, monolithically integrated micro laminar flow fuel cell with a bridge-shaped microchannel cross-section

Abstract We report the fabrication of a planar, silicon-based, monolithically integrated micro laminar flow fuel cell (μLFFC) using standard MEMS and IC-compatible fabrication technologies. The μLFFC operates with acid supported solutions of formic acid and potassium permanganate, as a fuel and oxidant respectively. The micro-fuel cell design features two in-plane anodic and cathodic microchannels connected via a bridge to confine the diffusive liquid–liquid interface away from the electrode areas and to minimize crossover. Palladium high-active-surface-area catalyst was selectively integrated into the anodic microchannel by electrodeposition, whereas no catalyst was required in the cathodic microchannel. A three-dimensional (3D) diffusion-convection model was developed to study the behavior of the diffusion zone and to extract appropriate cell-design parameters and operating conditions. Experimentally, we observed peak power densities as high as 26 mW cm −2 when operating single cells at a flow rate of 60 μL min −1 at room temperature. The miniature membraneless fuel cell design presented herein offers potential for on-chip power generation, which has long been prohibited by integration complexities associated with the membrane.