论文信息 - Effect of the Si Õ SiO 2 interface on self-diffusion of Si in semiconductor-grade SiO 2 - 字舞流文

Effect of the Si Õ SiO 2 interface on self-diffusion of Si in semiconductor-grade SiO 2

A. Fujiwara | U. Gösele | H. Kageshima | M. Uematsu | S. Fukatsu | Tomonori Takahashi | Kohei M. Itoha