Deformable micromirror devices as phase-modulating high-resolution light valves

Abstract We report on two different technologies for deformable micromirror devices as phase-modulating light valves for high-resolution optical applications. Both technologies are compatible with a 30 V CMOS technology for active matrix addressing. We have developed and fabricated a 512 × 464 pixel light valve with CMOS addressing and viscoelastic layer deformable mirrors on top. The performance of the light valve has been demonstrated by an application for fast submicron laser direct writing. Furthermore, we report promising results on cantilever-type deformable mirrors to be integrated with the CMOS active matrix.