论文信息 - A narrow process window for the preparation of polytypes of microcrystalline silicon carbide thin films by hot-wire CVD method - 字舞流文

A narrow process window for the preparation of polytypes of microcrystalline silicon carbide thin films by hot-wire CVD method

N. Yoshida | S. Nonomura | Tomonari Hamaguchi | Kotaro Hayashi | H. Natsuhara | S. Terazawa