An electrostatic scanning micromirror with diaphragm mirror plate and diamond-shaped reinforcement frame
暂无分享,去创建一个
Chang-Hyeon Ji | Jong-Uk Bu | Sang-Cheon Kim | See-Hyung Lee | Youngjoo Yee | J. Bu | C. Ji | Seong-hyok Kim | Seong-Hyok Kim | Y. Yee | See-Hyung Lee | Moongoo Choi | Sang-Cheon Kim | Moongoo Choi
[1] Yong-Kweon Kim,et al. Electromagnetic micromirror array with single-crystal silicon mirror plate and aluminum spring , 2003 .
[2] S. Ueda,et al. A full-time accelerated vertical comb-driven micromirror for high speed 30-degree scanning , 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.
[3] Richard S. Muller,et al. Dynamic deformation of scanning mirrors , 2000, 2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399).
[4] K.Y. Lau,et al. Micromachined polysilicon microscanners for barcode readers , 1996, IEEE Photonics Technology Letters.
[5] Hiroshi Miyajima,et al. A MEMS electromagnetic optical scanner for a commercial confocal laser scanning microscope , 2003 .
[6] C. Corcoran,et al. Electromagnetically actuated mirror arrays for use in 3-D optical switching applications , 2004, Journal of Microelectromechanical Systems.
[7] Chang-Hyeon Ji,et al. Diamond shaped frame supported electrostatic scanning micromirror , 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..
[8] Young-Chul Ko,et al. Bonding of silicon scanning mirror having vertical comb fingers , 2002 .
[9] Hakan Urey,et al. Torsional MEMS scanner design for high-resolution scanning display systems , 2002, SPIE Optics + Photonics.
[10] M. Esashi,et al. Silicon micromachined two-dimensional galvano optical scanner , 1994 .
[11] D. Kunze,et al. Large deflection micromechanical scanning mirrors for linear scans and pattern generation , 2000, IEEE Journal of Selected Topics in Quantum Electronics.
[12] K. Yamada,et al. A novel asymmetric silicon micro-mirror for optical beam scanning display , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.
[13] Matthew Hart,et al. Stretched-film micromirrors for improved optical flatness , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).
[14] Hakan Urey,et al. Torsional MEMS scanner design for high-resolution display systems , 2002 .
[15] O. Solgaard,et al. Self-aligned vertical electrostatic combdrives for micromirror actuation , 2003 .
[16] M.C. Wu,et al. Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors , 2004, IEEE Journal of Selected Topics in Quantum Electronics.