Poly/high-k/SiON gate stack and novel profile engineering dedicated for ultralow-voltage silicon-on-thin-BOX (SOTB) CMOS operation
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T. Iwamatsu | T. Hiramoto | H. Oda | T. Tsunomura | T. Mizutani | H. Makiyama | N. Sugii | Y. Yamaguchi | T. Hiramoto | T. Iwamatsu | H. Oda | T. Mizutani | H. Makiyama | N. Sugii | T. Tsunomura | Y. Yamamoto | Y. Yamaguchi | Y. Yamamoto