论文信息 - Wafer Scale Fabrication of Dense and High Aspect Ratio Sub-50 nm Nanopillars from Phase Separation of Cross-Linkable Polysiloxane/Polystyrene Blend. - 字舞流文

Wafer Scale Fabrication of Dense and High Aspect Ratio Sub-50 nm Nanopillars from Phase Separation of Cross-Linkable Polysiloxane/Polystyrene Blend.

Changsheng Yuan | Yanfeng Chen | Haixiong Ge | Yushuang Cui | Xinyu Chen | Chunyu Huang | Yang Li | Yuli Hao | Xingyao Chen | Kai Qiu | Xinyu Chen | Xingyao Chen