Design and experimental study of DSP-based digital control for an electrostatic levitation system

In this paper,the overall structure of a DSP-based Digital controller and the control algorithm are presented.Experimental investigation on the 3-axis electrostatic levitation system,which is based on this controller,reveals that the system bandwidth reaches 750 Hz whose resonant peak less than 3 dB.All the key performance specifications,including the stiffness,can well satisfy the control requirement of our electrostatic levitation system.