High Extinction Ratio Widely Tunable Low-Loss Integrated Si3N4 Third-Order Filter

We demonstrate an integrated continuously tunable third-order ring filter with a measured extinction ratio of 80dB, a 100x improvement over previously demonstrated integrated 3rd or 6th order filters. Using integrated thermal tuning elements, the filter can be tuned over 100% of its 48 GHz free spectral range with 1.3 dB insertion loss. The filters are fabricated on a wafer-scale foundry compatible Si3N4 low-loss platform enabling integration with a wide variety of previously demonstrated passive and active elements. The high extinction ratio, low loss, flat passband and steep roll-off is desirable for a broad range of applications including pump-stokes separation for Brillouin scattering, idler separation in four-wave mixing and separation of entangled states for quantum communications that utilize nonlinear optics.

[1]  Jason C. C. Mak,et al.  Automatic Resonance Alignment of High-Order Microring Filters , 2015, IEEE Journal of Quantum Electronics.

[2]  Peter T. Rakich,et al.  Large Brillouin amplification in silicon , 2015, Nature Photonics.

[3]  John E. Bowers,et al.  Integrated Ultra-Low-Loss 4-Bit Tunable Delay for Broadband Phased Array Antenna Applications , 2013, IEEE Photonics Technology Letters.

[4]  Preecha P. Yupapin,et al.  The serially coupled multiple ring resonator filters and Vernier effect , 2009 .

[5]  A. Sudbø,et al.  Film mode matching: a versatile numerical method for vector mode field calculations in dielectric waveguides , 1993 .

[6]  C. M. Natarajan,et al.  On-chip quantum interference between silicon photon-pair sources , 2013, Nature Photonics.

[7]  Rajeev J Ram,et al.  Low Power Thermal Tuning of Second-order Microring Resonators , 2007, 2007 Conference on Lasers and Electro-Optics (CLEO).

[8]  B. Little,et al.  Tunable bandwidth microring resonator filters , 2008, 2008 34th European Conference on Optical Communication.

[9]  Tymon Barwicz,et al.  Multistage high-order microring-resonator add-drop filters. , 2006, Optics letters.

[11]  Jun Rong Ong,et al.  Ultra-High-Contrast and Tunable-Bandwidth Filter Using Cascaded High-Order Silicon Microring Filters , 2013, IEEE Photonics Technology Letters.

[12]  Brent E. Little Advances in microring resonators , 2003 .

[13]  Min Xiao,et al.  Demonstration of a chip-based optical isolator with parametric amplification , 2016, Nature Communications.

[14]  John E. Bowers,et al.  Ultra-Low Loss Large Area Waveguide Coils for Integrated Optical Gyroscopes , 2017, IEEE Photonics Technology Letters.

[15]  T. K. Woodward,et al.  GHz-bandwidth optical filters based on high-order silicon ring resonators. , 2010, Optics express.

[16]  D. Blumenthal,et al.  Erbium-doped waveguide DBR and DFB laser arrays integrated within an ultra-low-loss Si3N4 platform. , 2014, Optics express.

[17]  D. Gill,et al.  Very high-order microring resonator filters for WDM applications , 2004, IEEE Photonics Technology Letters.

[18]  A. Leinse,et al.  TriPleX: The versatile silicon nitride waveguide platform , 2016, 2016 Progress in Electromagnetic Research Symposium (PIERS).

[19]  John E. Bowers,et al.  Low-Loss Silicon Nitride AWG Demultiplexer Heterogeneously Integrated With Hybrid III–V/Silicon Photodetectors , 2014, Journal of Lightwave Technology.

[20]  Marc Sorel,et al.  Photonic Integrated Filter With Widely Tunable Bandwidth , 2014, Journal of Lightwave Technology.

[21]  D. G. Rabus,et al.  Integrated Ring Resonators , 2020, Springer Series in Optical Sciences.