Fabrication of two-dimensional photonic crystals with controlled defects by use of multiple exposures and direct write.

We have developed an approach for relatively rapid and easy fabrication of large-area two-dimensional (2-D) photonic crystal structures with controlled defects in the lattice. The technique is based on the combination of two lithographic steps in UV-sensitive SU-8 photoresist. First, multiple exposures of interference fringes are used in combination with precise rotation of the sample to define a 2-D lattice of holes. Second, a strongly focused UV laser beam is used to define line-defect waveguides by localized exposure in the recorded but not yet developed lattice from the first step. After development, the mask is transferred into a GaAs substrate with dry etching in chemically assisted ion-beam etching.

[1]  E. Costard,et al.  Photonic band gaps and holography , 1997 .

[2]  Roberto Cingolani,et al.  Nanopatterning of organic and inorganic materials by holographic lithography and plasma etching , 2000 .

[3]  Paul V. Braun,et al.  Multi‐Photon Polymerization of Waveguide Structures Within Three‐Dimensional Photonic Crystals , 2002 .

[4]  O. Painter,et al.  Two-dimensional photonic bandgap defect laser , 1999, 1999 Digest of the LEOS Summer Topical Meetings: Nanostructures and Quantum Dots/WDM Components/VCSELs and Microcavaties/RF Photonics for CATV and HFC Systems (Cat. No.99TH8455).

[5]  J. Sturm,et al.  On-chip natural assembly of silicon photonic bandgap crystals , 2001, Nature.

[6]  A. Scherer,et al.  Waveguiding in Planar Photonic Crystals , 2000 .

[7]  G. Ozin,et al.  Large-scale synthesis of a silicon photonic crystal with a complete three-dimensional bandgap near 1.5 micrometres , 2000, Nature.

[8]  Satoru Shoji,et al.  Photofabrication of three-dimensional photonic crystals by multibeam laser interference into a photopolymerizable resin , 2000 .

[9]  Paul V. Braun,et al.  Multi-photon polymerization of waveguide structures within 3D photonic crystals , 2002 .

[10]  Yeshaiahu Fainman,et al.  Fabrication of optical structures using SU-8 photoresist and chemically assisted ion beam etching , 2003 .

[11]  Jane M. Shaw,et al.  Micromachining applications of a high resolution ultrathick photoresist , 1995 .

[12]  R. G. Denning,et al.  Fabrication of photonic crystals for the visible spectrum by holographic lithography , 2000, Nature.

[13]  Saulius Juodkazis,et al.  Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals , 2001 .