论文信息 - Fabrication of W/C Multilayers by Direct Ion Beam Deposition - 字舞流文

Fabrication of W/C Multilayers by Direct Ion Beam Deposition

The multilayer structures of tungsten and carbon for soft x-ray mirrors were fabricated by the low energy (

Kazuhiko Ito | K. Nishimoto | K. Watanabe | I. Kataoka | F. Widmann

[1] A. Tonegawa,et al. Plasma filament ion source , 1986 .

[2] Pierre Ruterana,et al. Performances Of C-W Multilayers As Soft X-Rays Optics : High Reflectivity In The Range 2d = 60 to 100 Å , 1986, Other Conferences.

[3] Yutaka Watanabe,et al. Comparison Among Multilayer Soft X-Ray Mirrors Fabricated By Electron Beam, Dc-, Rf-Magnetron Sputtering And Ion Beam Sputtering Deposition , 1988, Optics & Photonics.

[4] I. Kataoka. Technological development of soft X-ray mirror in the advanced material processing and machining technology research association (AMMTRA) , 1992 .