60-nm-thick basic photonic components and Bragg gratings on the silicon-on-insulator platform.

We demonstrate integrated basic photonic components and Bragg gratings using 60-nm-thick silicon-on-insulator strip waveguides. The ultra-thin waveguides exhibit a propagation loss of 0.61 dB/cm and a bending loss of approximately 0.015 dB/180° with a 30 μm bending radius (including two straight-bend waveguide junctions). Basic structures based on the ultra-thin waveguides, including micro-ring resonators, 1 × 2 MMI couplers, and Mach-Zehnder interferometers are realized. Upon thinning-down, the waveguide effective refractive index is reduced, making the fabrication of Bragg gratings possible using the standard 248-nm deep ultra-violet (DUV) photolithography process. The Bragg grating exhibits a stopband width of 1 nm and an extinction ratio of 35 dB, which is practically applicable as an optical filter or a delay line. The transmission spectrum can be thermally tuned via an integrated resistive micro-heater formed by a heavily doped silicon slab beside the waveguide.

[1]  Jason R. Grenier,et al.  Femtosecond laser fabrication of phase-shifted Bragg grating waveguides in fused silica. , 2012, Optics letters.

[2]  T. Baehr‐Jones,et al.  Ultra-thin silicon-on-insulator strip waveguides and mode couplers , 2012 .

[3]  G. Lo,et al.  A single adiabatic microring-based laser in 220 nm silicon-on-insulator. , 2014, Optics express.

[4]  Xinwan Li,et al.  Tunable two-stage self-coupled optical waveguide resonators. , 2013, Optics letters.

[5]  M. Lipson,et al.  Low loss etchless silicon photonic waveguides , 2009, 2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum electronics and Laser Science Conference.

[6]  Y. Fainman,et al.  Cladding-modulated bragg gratings in silicon waveguides , 2009, 2009 Conference on Lasers and Electro-Optics and 2009 Conference on Quantum electronics and Laser Science Conference.

[7]  Xianshu Luo,et al.  PN-type carrier-induced filter with modulatable extinction ratio. , 2014, Optics express.

[8]  Sophie LaRochelle,et al.  Bandpass integrated Bragg gratings in silicon-on-insulator with well-controlled amplitude and phase responses. , 2015, Optics letters.

[9]  Sasan Fathpour,et al.  Demonstration of complementary apodized cascaded grating waveguides for tunable optical delay lines. , 2013, Optics letters.

[10]  Lidija Sekaric,et al.  Mode conversion losses in silicon-on-insulator photonic wire based racetrack resonators. , 2006, Optics express.

[11]  C P Grover,et al.  Modified white-light Mach-Zehnder interferometer for direct group-delay measurements. , 1998, Applied optics.

[12]  S. Xiao,et al.  Modeling and measurement of losses in silicon-on-insulator resonators and bends. , 2007, Optics express.

[13]  Vincent Aimez,et al.  Characterization and reduction of spectral distortions in silicon-on-insulator integrated Bragg gratings. , 2013, Optics express.

[14]  Linjie Zhou,et al.  Tunable Vernier Microring Optical Filters With $p\!-\!i \!-\!p$-Type Microheaters , 2013, IEEE Photonics Journal.

[15]  Lars Zimmermann,et al.  Continuously tunable delay line based on SOI tapered Bragg gratings. , 2012, Optics express.

[16]  F. Xia,et al.  Group index and group velocity dispersion in silicon-on-insulator photonic wires. , 2006, Optics express.

[17]  Lukas Chrostowski,et al.  Performance of ultra-thin SOI-based resonators for sensing applications. , 2014, Optics express.

[18]  Michal Lipson,et al.  Low loss etchless silicon photonic waveguides , 2009 .

[19]  S. Fathpour,et al.  Demonstration of tunable optical delay lines based on apodized grating waveguides. , 2013, Optics express.

[20]  K. Petermann,et al.  Deep-UV Technology for the Fabrication of Bragg Gratings on SOI Rib Waveguides , 2009, IEEE Photonics Technology Letters.

[21]  H. Thacker,et al.  Ultralow-loss, high-density SOI optical waveguide routing for macrochip interconnects. , 2012, Optics express.

[22]  Lukas Chrostowski,et al.  Precise control of the coupling coefficient through destructive interference in silicon waveguide Bragg gratings. , 2014, Optics letters.

[23]  L. Chrostowski,et al.  Narrow-band waveguide Bragg gratings on SOI wafers with CMOS-compatible fabrication process. , 2012, Optics express.

[24]  Xu Wang,et al.  Silicon photonic waveguide Bragg gratings , 2013 .

[25]  S. LaRochelle,et al.  Impact of Sidewall Roughness on Integrated Bragg Gratings , 2011, Journal of Lightwave Technology.

[26]  Michael Hochberg,et al.  Ultrathin Silicon-on-Insulator Grating Couplers , 2012, IEEE Photonics Technology Letters.