초대형 TFT-LCD용 Bake Chamber 상부덮개 및 Glass의 구조해석

The objectives of this study are to investigate mechanical characteristics of TFT-LCD Bake Chamber under the loading and the heat. The characteristics of TFT-LCD Bake Chamber consist to glass thermal effect, structural weight effect, time-consuming measurements, and the geometric complexity. The structure analysis has been carried out a series of numerical analysis using ABAQUS program