Precision laser metallization

A process for providing precision deposits (3) of metal films unto a working substrate (5) by transmitting an ultrafast laser pulse thorough a transparent target substrate (6) whose lower surface supports a metal film (7). Rapid laser heating produces pressure that propels vaporized metal unto the working substrate whereupon the metal vapor rapidly resolidifies on a dimension substantially equal to the ultrafast laser's focal spot size.

[1]  G. Mourou,et al.  Terawatt to Petawatt Subpicosecond Lasers , 1994, Science.

[2]  P. R. Bolton,et al.  Time-integrated reflectivity of laser-induced back-ablated aluminum thin film targets , 1997 .

[3]  Anthony J. Pedraza,et al.  New approach of a laser-induced forward transfer for deposition of patterned thin metal films , 1995 .

[4]  G. Was,et al.  Laser-driven micro-explosive bonding of aluminium films to copper and silicon , 1988 .

[5]  Eric Fogarassy,et al.  Laser-induced forward transfer: A new approach for the deposition of high T_c superconducting thin films , 1989 .

[6]  G. Mourou,et al.  Laser ablation and micromachining with ultrashort laser pulses , 1997 .

[7]  G. Mourou,et al.  Compact directly diode-pumped femtosecond Nd:glass chirped-pulse-amplification laser system. , 1997, Optics letters.

[8]  T. Südmeyer,et al.  16.2-W average power from a diode-pumped femtosecond Yb:YAG thin disk laser. , 2000, Optics letters.

[9]  Tamás Szörényi,et al.  Ar+ laser-induced forward transfer (LIFT): a novel method for micrometer-size surface patterning , 1993 .

[10]  M. Aziz,et al.  Fundamentals of Beam-Solid Interactions and Transient Thermal Processing Symposium Held in Boston, Massachusetts on November 30-December 30 1987. Volume 100. Materials Research Society Symposium Proceedings. , 1988 .

[11]  W. H. Knox Practical lasers will spawn varied ultrafast applications , 1996 .

[12]  G. Busch,et al.  Plasma production by laser-driven explosively heated thin metal films , 1985 .

[13]  D. Ehrlich,et al.  CHAPTER 7 – Laser Deposition: Energetics and Chemical Kinetics , 1989 .

[14]  I Zergioti,et al.  Etching and printing of diffractive optical microstructures by a femtosecond excimer laser. , 1999, Applied optics.

[15]  Tamás Szörényi,et al.  Pulsed laser ablative deposition of thin metal films , 1989 .

[16]  F. J. Adrian,et al.  Metal deposition from a supported metal film using an excimer laser , 1986 .

[17]  A. N. Jette,et al.  A study of the mechanism of metal deposition by the laser-induced forward transfer process , 1987 .

[18]  Gerard Mourou,et al.  Compression of amplified chirped optical pulses , 1985 .