论文信息 - A Multi-Sensor Approach for Complex and Large-Area Applications in Micro and Nanometrology

A Multi-Sensor Approach for Complex and Large-Area Applications in Micro and Nanometrology

Abstract: In micro and nanotechnology, the metrological demands are increasing. The structures to be measured are becoming more complex with smaller structure widths, increasingly larger surface regions, and thousands of inspection features. In order to solve the problems, it has become desirable and even necessary to combine multi-sensor technology with high precision nanopositioning and nanomeasuring technology. The Nanopositioning and Nanomeasuring Machine NMM-1 with a measuring range of 25 mm × 25 mm × 5 mm and sub-nanometer resolution allows the application of several optical, tactile and atomic force probes. The combination of several sensor technologies in a multi-sensor approach for application with the NMM-1 is demonstrated.

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