A three DOF linear ultrasonic motor for transport and micropositioning

Abstract The paper deals with the study and use of a linear ultrasonic motor at low voltages. Standing waves are generated in a 64 mm × 38 mm × 2.5  mm vibrator by 20 piezoelectric ceramics and converted into sliding motions by the friction between four legs and the worktop: translations and rotations are achieved. The speed of the motor is studied according to the amplitude and frequency of the driving voltage as well as the mass of the load. Then, a model of the system is retrieved for some set points and validated using a position control. According to its interesting performances for transport and positioning, the motor is used to motorize a moving palet for the transfer of parts in a microassembly workcell.