Photocapacitive effect in MIS structures. I. Theory

The impedance of MIS structures under illumination is calculated. In the treatment of the problem the surface trapping is taken into account. It is shown that the capture of minority non-equilibrium carriers by the surface states leads to an increase and the capture of the majority ones to an decrease of the photocapacitive effect. A comparison is made between the photocapacitive and photovoltaic effects. [Russian Text Ignored].