论文信息 - Impact of SF6 plasma treatment on performance of AlGaN/GaN HEMT - 字舞流文

Impact of SF6 plasma treatment on performance of AlGaN/GaN HEMT

G. Vanko | I. Kostic | T. Lalinsky | Z. Mozolova | S. Hascik | A. Vincze | J. Skriniarová | I. Ryger | M. Tomáška | S. Hascik | J. Škriniarová