Porous Ceramic Packaging for a MEMS Humidity Sensor Requiring Environmental Access
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R. Dean | J. Pack | N. Sanders | P. Reiner | S. Surgnier | C. W. Long | R. Fenner | W. Fenner
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R. Dean | J. Pack | N. Sanders | P. Reiner | S. Surgnier | C. W. Long | R. Fenner | W. Fenner