High-selectivity single-chip spectrometer for operation at visible wavelengths

A micro-spectrometer has been realized based on an array of Fabry-Perot thin-film optical resonators. The 16 channel micro-spectrometer is IC fabrication compatible and operates in the visible spectral range with an inter-channel shift of 6 nm. Each of the channels is sensitive in a single peak with FWHM of 16 nm. A FWHM <2 nm and finesse of 40 for narrowband operation is demonstrated.

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