Mass flow controller for control purge and managing method thereof

Disclosure relates to a mass flow controller for control purge and method of operation, for controlling the maximum flow rate for the user to maintain a constant maximum flow rate when performing the purge function after setting the purge function mode according to the intended use of the mass flow controller When set to control the purge mode, by comparing the flow rate to be input at the option of the user setting value and a predetermined threshold value in a control circuit, by switching to purge gain resistor with a gain value to perform the purge function predetermined maximum flow rate control the valve to maintain or general control functions, and switching to the normal control gain resistor with a gain value to control the valve so as to precisely control a low flow rate to perform, the user and the purge function in accordance with whether use of a mass flow controller mode, is set to after the valve for opening the valve fully so that the maximum flow rate The open setting of the purge mode, by comparing the threshold value the user has preset the set value of the flow rate input from the control circuit unit, up to the flow rate control valve to flow so that the valve precisely control the opening or or a low flow rate to a maximum . Accordingly, the invention is a device to eliminate the inconvenience that must use a mass flow controller for the general control and fuzzy, as shown in the prior art by simultaneously implementing a common precise control and fuzzy function using a single mass flow controller, with it easier to configure, and provides an effect that can reduce the manufacturing cost.