论文信息 - Low grain size TiN thin films obtained by low energy ion beam assisted deposition - 字舞流文

Low grain size TiN thin films obtained by low energy ion beam assisted deposition

J. Albella | F. Gordillo-Vazquez | J. M. López | O. Böhme | F. Gordillo-Vázquez | F. Gordillo‐Vázquez