论文信息 - Upgrading the “Berg-model” for reactive sputtering processes - 字舞流文

Upgrading the “Berg-model” for reactive sputtering processes

Several phenomena are neglected in the original “Berg model” in order to provide a simple model of the reactive sputtering process. There exist situations, however, where this simplified treatment ...

Sören Berg | Tomas Nyberg | Erik Särhammar | S. Berg | T. Nyberg | E. Särhammar

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