ESD Susceptibility of Submicron Air Gaps
暂无分享,去创建一个
This work describes the investigation of the ESD susceptibility of submicron air gaps which are used e.g. in filter devices. The breakdown behaviour of the air gaps is analyzed in both the HBM (Human Body Model) time domain and the CDM (Charged Device Model) time domain. Transmission Line pulsing (TLP) reproduces the different failure signatures. Furthermore, the failure model itself is explained in detail.
[1] M. Haunschild,et al. Very-fast transmission line pulsing of integrated structures and the charged device model , 1996, 1996 Proceedings Electrical Overstress/Electrostatic Discharge Symposium.
[2] Heinrich Wolf,et al. A Dedicated TLP Set-Up to Investigate the ESD Robustness of RF Elements and Circuits , 2005, Microelectron. Reliab..
[3] Iu. P. Raizer. Gas Discharge Physics , 1991 .
[4] Sven Peter Bönisch. Die elektrostatische Entladung (ESD) bei kleinen Abständen und Spannungen , 2004 .