Quartz crystal microbalance for real-time monitoring chlorosilane gas transport in slim vertical cold wall chemical vapor deposition reactor
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S. Hara | Toshinori Takahashi | Mana Otani | Mitsuko Muroi | Kenta Irikura | Miya Matsuo | Ayami Yamada | Hitoshi Habuka | Y. Ishida | S. Ikeda