Investigation of Polymer-Coated Film Bulk Acoustic Wave Resonator for Acetone Vapor Detection

In this paper, we fabricate the polymethylmethacrylate (PMMA) coated film bulk acoustic wave resonator (FBAR) gas sensors and investigate the sensing performance. The FBARs work at near 2.48 GHz and have high performances. The 10~70 nm thick PMMA layer were deposited on the surface of the FBARs as the sensitive coating. The influence of the thickness of PMMA on the sensing performances is investigated in detail. The experimental results indicate that the PMMA coated FBARs can be quite sensitive to acetone vapor. After PMMA coating, the resonance frequency and Q-factor are lineally decreased due to the added mass loading onto the electrode. The PMMA coated FBAR is able to detect acetone vapor as low as 0.04% with a gas sensitivity as high as 685 kHz/%. These PMMA coated FBARs could be further developed as a handheld sensor for vapor detection.

[1]  Zhaoxin Li,et al.  Highly sensitive detection of organophosphorus pesticides by acetylcholinesterase-coated thin film bulk acoustic resonator mass-loading sensor. , 2013, Biosensors & bioelectronics.

[2]  Gunilla Wingqvist,et al.  AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications — A review , 2010 .

[3]  M. Benetti,et al.  Thin-Film Bulk-Acoustic-Resonator Gas Sensor Functionalized With a Nanocomposite Langmuir–Blodgett Layer of Carbon Nanotubes , 2008, IEEE Transactions on Electron Devices.

[4]  Wolfgang Pompe,et al.  Film bulk acoustic resonators for DNA and protein detection and investigation of in vitro bacterial S-layer formation , 2009 .

[5]  Seokheun Choi,et al.  A High-Quality-Factor Film Bulk Acoustic Resonator in Liquid for Biosensing Applications , 2011, Journal of Microelectromechanical Systems.

[6]  Min Liang,et al.  The AlN based solidly mounted resonators consisted of the all-metal conductive acoustic Bragg reflectors , 2010 .

[7]  K. Moon,et al.  A PMMA coated PMN–PT single crystal resonator for sensing chemical agents , 2010 .

[8]  Jingjing Wang,et al.  Nerve gas sensor using film bulk acoustic resonator modified with a self-assembled Cu2+/11-mercaptoundecanoic acid bilayer , 2010 .

[9]  E. S. Kim,et al.  Label-free detection of protein-ligand interactions in real time using micromachined bulk acoustic resonators , 2010 .

[10]  D. Weinkauf,et al.  Vapor sorption in plasma polymerized vinyl acetate and methyl methacrylate thin films , 2001 .

[11]  T. Yokoyama,et al.  Development of Piezoelectric Thin Film Resonator and Its Impact on Future Wireless Communication Systems , 2005 .

[12]  Paul Muralt,et al.  Bulk acoustic wave resonator operating at 8 GHz for gravimetric sensing of organic films , 2006 .