论文信息 - On-Chip Tensile Testing of the Mechanical and Electro-Mechanical Properties of Nano-Scale Silicon Free-Standing Beams - 字舞流文

On-Chip Tensile Testing of the Mechanical and Electro-Mechanical Properties of Nano-Scale Silicon Free-Standing Beams

J. Raskin | T. Pardoen | V. Passi | M. Hagberg | U. Södervall | B. Nilsson | G. Petersson | U. Bhaskar | A. Zulfiqar