Temperature-Dependent Characteristics of Surface Acoustic Wave Resonators Deposited on (0°, 138.5°, $\psi$ ) Langasite Cuts

Surface acoustic wave (SAW) resonators were deposited on (0°, 138.5°, <inline-formula> <tex-math notation="LaTeX">$\psi $ </tex-math></inline-formula>) LGS (langasite, La<sub>3</sub>Ga<sub>5</sub>SiO<sub>14</sub>) cuts with different Euler angles <inline-formula> <tex-math notation="LaTeX">$\psi $ </tex-math></inline-formula> in this paper. The temperature-dependent characteristics of these SAW resonators were investigated systematically. At room temperature, the (0°, 138.5°, 26.6°) LGS cut has the maximum SAW velocity of about 2716 m/s. The (0°, 138.5°, 3.4°) LGS cut has the minimum SAW velocity of about 2377 m/s. The first-order and second-order temperature coefficients of frequency in the (0°, 138.5°, 26.6°) and (0°, 138.5°, 33.4°) LGS cuts are nearest to zero. The turnover temperature decreases first when the angle <inline-formula> <tex-math notation="LaTeX">$\psi $ </tex-math></inline-formula> varies from 3.4° to 26.6° and increases with the further increase of <inline-formula> <tex-math notation="LaTeX">$\psi $ </tex-math></inline-formula>. The results in this paper may help us design LGS SAW temperature sensors and other types of sensors.

[1]  N Naumenko,et al.  Optimal cuts of langasite, La3Ga5SiO14 for SAW devices. , 2001, IEEE transactions on ultrasonics, ferroelectrics, and frequency control.

[2]  Jinhee Kim,et al.  Formation of low-resistance ohmic contacts between carbon nanotube and metal electrodes by a rapid thermal annealing method , 2000 .

[3]  G. G. Stokes.  "J." , 1890, The New Yale Book of Quotations.

[4]  A. Shvetsov,et al.  Theoretical and experimental investigation of langasite as material for wireless high temperature SAW sensors , 2010, 2010 IEEE International Ultrasonics Symposium.

[5]  A. Rønnekleiv,et al.  SAW properties of langasite with Euler angles [0/spl deg/,140/spl deg/,25/spl deg/] , 2000, 2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121).

[6]  Gudrun Bruckner,et al.  SAW strain sensitivity of selected rayleigh wave crystal cuts , 2009, 2009 IEEE International Ultrasonics Symposium.

[7]  M. Salomaa,et al.  Surface transverse waves on langasite , 1998 .

[8]  David W. Greve,et al.  Langasite surface acoustic wave sensors: Fabrication and testing , 2012, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.

[9]  S. Pandey,et al.  Analysis of multilayered SAW based gas sensor , 2017, 2017 International Conference on Trends in Electronics and Informatics (ICEI).

[10]  N. Naumenko.  Anomalous dispersion of SAW in platinum grating on langasite with Euler angles (0°, 138.5°, 26.6°) , 2010, 2010 IEEE International Ultrasonics Symposium.

[11]  L. M. Reindl,et al.  Experimental and theoretical investigations of some useful langasite cuts for high-temperature SAW applications , 2013, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[12]  Rui Wang,et al.  High-Temperature SAW Wireless Strain Sensor with Langasite , 2015, Sensors.

[13]  Gerhard Fischerauer,et al.  Surface acoustic wave sensors for high-temperature applications , 1998, Proceedings of the 1998 IEEE International Frequency Control Symposium (Cat. No.98CH36165).

[14]  S. Ballandras,et al.  A comparative study of LGS coefficient set accuracy assessed by experiments , 2014, 2014 European Frequency and Time Forum (EFTF).

[15]  T. Aubert,et al.  High temperature Pt/LGS SAW sensor: From theory to experiment , 2011, 2011 IEEE SENSORS Proceedings.

[16]  Xingzhao Liu,et al.  Effects of AlN Coating Layer on High Temperature Characteristics of Langasite SAW Sensors , 2016, Sensors.

[17]  I. B. Yakovkin,et al.  Numerical and experimental investigation SAW in langasite , 1995, 1995 IEEE Ultrasonics Symposium. Proceedings. An International Symposium.

[18]  Natalya Naumenko,et al.  Optimal Cuts of Langasite, La 3 Ga 5 SiO 14 for SAW Devices , 2001 .