Research on Computer Aided MEMS Process Integration Technology

According to the bottle-neck problem of MEMS that serious mismatch of fabrication technology and design tools, a novel computer aided MEMS process integration technology was put forward in this paper,which considers characteristics of fabrication and its limitations to enhance the effective and ability of process design during design of MEMS devices.This design technology was based on the database of structure materials, process materials and limitations which come from equipments or environments,and driven by that process can be expressed by physical or chemical reaction among structure materials and reactive solutions/gas/ions...,to extract process design rules.During the design strategy,the 2-D data of device'profile according to each step was calculated out by layout data and process parameters,these information is applied to check out error or mismatch among the process flows,and meanwhile these data can be transferred to following analysis, hence the whole program can realize the integrated design of both device'process and structure.In the end,a 3D visua- liozation tool IMEE1.0,which acts as a verification of this design technology was also developed.An example of a surface process gas sensor was investigated, which realized this integrated process design technology.