论文信息 - Observations of the initial stages on reactive gas-timing sputtered TaO thin films by dynamic in situ spectroscopic ellipsometery - 字舞流文

Observations of the initial stages on reactive gas-timing sputtered TaO thin films by dynamic in situ spectroscopic ellipsometery

P. Buranasiri | N. Nuntawong | J. Nukeaw | P. Chindaudom | P. Limsuwan | P. Eiamchai | M. Horprathum | S. Limwichean | C. Chananonnawathorn | H. Nakajima | A. Klamchuen | T. Lertvanithphol | V. Patthanasettakul | P. Muthitamongkol | D. Chittinan