High-resolution micrometer vernier scale for micro electro mechanical system

The invention relates to a high-resolution micrometer vernier scale structure for measuring the micro physical dimension variable quantity and (or) the movement amount of a micro electro mechanical system structure. The high-resolution micrometer vernier scale structure comprises a one-dimensional mobile measuring vernier scale body, a lever mechanism for amplifying the movement amount and a relative type electric heating actuator. The high-resolution micrometer vernier scale structure uses current to generate heat to drive a testing probe to move, uses the lever mechanism to improve flexibility and uses the special vernier scale body to measure and equalize the movement amount. By means of the lever amplifying factor design, the micrometer resolution can be effectively and simply improved.