Particle count and analysis by using a cyclone particle sampler

We performed particle composition analysis of clean room particles by using a particle analyzer (PT1000) and a Cyclone Particle Sampler. While we expected to find only small particles in the clean room, we detected many large particles as well. Many floating particles are greatly influenced by air flow current. Particles are created by human movement and we speculate that this is related to air flow. We suggest methods to improve the cleanliness of the clean room and to enhance device yield.