论文信息 - Comparative study of Ni-silicide and Co-silicide for sub 0.25-mm technologies - 字舞流文

Comparative study of Ni-silicide and Co-silicide for sub 0.25-mm technologies

H. Bender | A. Lauwers | M. Potter | R. Lindsay | A. Satta | K. Maex | M. Stucchi | P. Besser | C. Vrancken | B. Deweerdt | S. Jin | T. Gutt | N. Roelandts | Fred Loosen