A novel 2-DOF compound compliant parallel guiding mechanism

Abstract Based on the analysis of existing guiding mechanisms, a novel 2-DOF compound compliant parallel guiding mechanism (2-DCCPGM) is proposed in this paper, which has compact structure, long motion range and negligible parasitic displacements. The relationship between the guiding displacements and the driving forces have been obtained from the pseudo-rigid-body (PRB) model of 2-DCCPGM. And the dynamic analysis is taken as well. Some design criteria are put forward, based on the analytical results. To analysis the guiding capability and the dynamic performance of 2-DCCPGM, finite element analysis (FEA) has been carried out. And the results of the static FEA simulations confirmed that the 2-DCCPGM barely generates parasitic displacements. A prototype has been manufactured, and experiments have been conducted to validate the performance of the 2-DCCPGM. And from the experimental results, the 2-DCCPGM has been proved to have satisfactory guiding performance. Moreover, the experiment results have also revealed that the machining deviation of the flexure hinges of 2-DCCPGM could cause parasitic displacements and reduce the guiding linearity of the 2-DCCPGM.

[1]  Qingsong Xu,et al.  New Flexure Parallel-Kinematic Micropositioning System With Large Workspace , 2012, IEEE Transactions on Robotics.

[2]  Dawei Zhang,et al.  Design issues in a decoupled XY stage: Static and dynamics modeling, hysteresis compensation, and tracking control , 2013 .

[3]  Kam K. Leang,et al.  Flexure design using metal matrix composite materials: Nanopositioning example , 2012, 2012 IEEE International Conference on Robotics and Automation.

[4]  Pengbo Liu,et al.  A new model analysis approach for bridge-type amplifiers supporting nano-stage design , 2016 .

[5]  Qidai Chen,et al.  Protein-based soft micro-optics fabricated by femtosecond laser direct writing , 2014, Light: Science & Applications.

[6]  Seiichi Hata,et al.  A piezo-driven compliant stage with double mechanical amplification mechanisms arranged in parallel , 2010 .

[7]  X. Kong,et al.  A Novel Large-Range XY Compliant Parallel Manipulator With Enhanced Out-of-Plane Stiffness , 2012 .

[8]  Dae-Gab Gweon,et al.  Error analysis of a flexure hinge mechanism induced by machining imperfection , 1997 .

[9]  F. Villar,et al.  75 mm stroke flexure stage for the LNE watt balance experiment , 2011 .

[10]  Guangbo Hao,et al.  Towards the design of monolithic decoupled XYZ compliant parallel mechanisms for multi-function applications , 2013 .

[11]  Karl Johan Åström,et al.  Design and Modeling of a High-Speed AFM-Scanner , 2007, IEEE Transactions on Control Systems Technology.

[12]  Simon Henein,et al.  Isotropic springs based on parallel flexure stages , 2016 .

[13]  Boris N. Chichkov,et al.  High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP) , 2013, Light: Science & Applications.

[14]  Wei Xu,et al.  Flexure hinges for piezoactuator displacement amplifiers: flexibility, accuracy, and stress considerations , 1996 .

[15]  Li Wei,et al.  Analysis of the displacement of complaint double parallel four-bar mechanism , 2009, 2009 4th IEEE Conference on Industrial Electronics and Applications.

[16]  Santhakumar Mohan,et al.  Inverse dynamics and control of a 3-DOF planar parallel (U-shaped 3-PPR) manipulator , 2015 .

[17]  Yoon Keun Kwak,et al.  A linear air bearing stage with active magnetic preloads for ultraprecise straight motion , 2010 .

[18]  Reymond Clavel,et al.  Delta3: design and control of a flexure hinge mechanism , 2001, Optics East.

[19]  Lena Zentner,et al.  General design equations for the rotational stiffness, maximal angular deflection and rotational precision of various notch flexure hinges , 2017 .

[20]  Lei Wu,et al.  Analysis of the displacement of lumped compliant parallel-guiding mechanism considering parasitic rotation and deflection on the guiding plate and rigid beams , 2015 .

[21]  Nicolae Lobontiu,et al.  Substructure compliance matrix model of planar branched flexure-hinge mechanisms: Design, testing and characterization of a gripper , 2015 .

[22]  Qingsong Xu,et al.  Novel design of a totally decoupled flexure-based XYZ parallel micropositioning stage , 2010, 2010 IEEE/ASME International Conference on Advanced Intelligent Mechatronics.

[23]  Liu Wangyu,et al.  Analysis of the displacement of distributed compliant parallel-guiding mechanism considering parasitic rotation and deflection on the guiding plate , 2014 .

[24]  Bijan Shirinzadeh,et al.  An inverse Prandtl–Ishlinskii model based decoupling control methodology for a 3-DOF flexure-based mechanism , 2015 .

[25]  Jingyan Dong,et al.  Development of a High-Bandwidth XY Nanopositioning Stage for High-Rate Micro-/Nanomanufacturing , 2011, IEEE/ASME Transactions on Mechatronics.

[26]  Feng Gao,et al.  Relationship among input-force, payload, stiffness and displacement of a 3-DOF perpendicular parallel micro-manipulator , 2010 .

[27]  Yanling Tian,et al.  Analysis of parasitic motion in parallelogram compliant mechanism , 2010 .

[28]  Stuart T. Smith,et al.  ELLIPTICAL FLEXURE HINGES , 1997 .

[29]  David M. Williamson,et al.  The lithographic lens: its history and evolution , 2006, SPIE Advanced Lithography.

[30]  I-Ming Chen,et al.  A Large-Displacement 3-DOF Flexure Parallel Mechanism with Decoupled Kinematics Structure , 2006, 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems.

[31]  Pier Paolo Valentini,et al.  Elasto-kinematic comparison of flexure hinges undergoing large displacement , 2017 .

[32]  Ke-qi Qi,et al.  Analysis of the displacement amplification ratio of bridge-type mechanism , 2015 .