Plasma-surface reactions at a spinning wall.

We report a new method for studying surface reactions and kinetics at moderately high pressures (<10 Torr) in near real time. A cylindrical substrate in a reactor wall is rotated at up to 200,000 rpm, allowing the surface to be periodically exposed to a reactive environment and then analyzed by a triple-differentially pumped mass spectrometer in as little as 150 micros thereafter. We used this method to study oxygen plasma reactions on anodized aluminum. When the substrate is spun with the plasma on, a large increase in O2 signal at m/e = 32 is observed with increasing rotation frequency, due to O atoms that impinge and stick on the surface when it is in the plasma, and then recombine over the approximately 0.7 to 40 ms period probed by changing the rotation frequency. Simulations of O2 signal versus rotation frequency indicate a wide range of recombination rate constants, ascribed to a range of O-binding energies.

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