A kind of grating icking tool active accommodation device with Abbe error calibration function

The present invention relates to grating ruling technical field, a kind of grating icking tool active accommodation device with Abbe error calibration function is specifically disclosed.The present invention includes tool holder lifting mechanism, knife rest support frame, micro-positioning table, workbench mounting seat, flexible hinge, piezoelectric ceramics, extension spring, small tool, diamond icking tool；Piezoelectric ceramics is with micro-positioning table is by CONTACT WITH FRICTION and four symmetrical flexible hinges cause that micro-positioning table has larger rigidity in the direction in addition to z-axis；Micro-positioning table carries out micro- positioning motion in the presence of piezoelectric ceramics stretching motion, along the z-axis direction so that the physical location of diamond icking tool is minimum with the offset deviation of ideal position.The present invention is measured the position of diamond icking tool in real time using twin shaft interferometer, avoid using influence of the Abbe measurement error to diamond icking tool positioning precision caused by single shaft interferometer, help to reduce diamond icking tool position error, improve grating ruling quality and performance indications.