J161011 Finite element analysis for driving characteristics of a polymer-MEMS mirror driven attractive force
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Hidekuni Takao | Kyohei Terao | Takaaki Suzuki | Fusao Shimokawa | Fumikazu Oohira | Junya Suzuki | Takuya Miura | Takahiro Namazu | Toshiyuki Morikaku | H. Takao | Takaaki Suzuki | T. Namazu | F. Shimokawa | F. Oohira | K. Terao | T. Miura | J. Suzuki | T. Morikaku