Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures
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J. M. Noworolski | G. Kovacs | K. Petersen | N. Maluf | C. Storment | Joseph J. Brown | E. Klaassen | J. Logan | Wendell Mcculley
[1] Johann W. Bartha,et al. Low temperature etching of Si in high density plasma using SF6/O2 , 1995 .
[2] M. Esashi,et al. High-rate directional deep dry etching for bulk silicon micromachining , 1995 .
[3] John W. Suh,et al. Flexible, dry-released process for aluminum electrostatic actuators , 1994 .
[4] T. A. Core,et al. A low cost monolithic accelerometer , 1992, 1992 Symposium on VLSI Circuits Digest of Technical Papers.
[5] Gregory T. A. Kovacs,et al. Regeneration microelectrode arrays for direct interface to nerves , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[6] K. Petersen,et al. Surface micromachined structures fabricated with silicon fusion bonding , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[7] Kurt E. Petersen,et al. Resonant beam pressure sensor fabricated with silicon fusion bonding , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[8] Kensall D. Wise,et al. A three-dimensional neural recording array , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[9] C. Linder,et al. Deep dry etching techniques as a new IC compatible tool for silicon micromachining , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
[10] Phillip W. Barth,et al. Silicon fusion bonding for fabrication of sensors, actuators and microstructures , 1990 .
[11] Yu-Chong Tai,et al. IC-processed electrostatic micro-motors , 1988, Technical Digest., International Electron Devices Meeting.
[12] R. Howe,et al. Resonant-microbridge vapor sensor , 1986, IEEE Transactions on Electron Devices.
[13] L. Hornbeck,et al. 128 × 128 deformable mirror device , 1983, IEEE Transactions on Electron Devices.
[14] L.M. Roylance,et al. A batch-fabricated silicon accelerometer , 1979, IEEE Transactions on Electron Devices.
[15] V. Yunkin,et al. Highly anisotropic selective reactive ion etching of deep trenches in silicon , 1994 .
[16] K. Najafi,et al. A bulk silicon dissolved wafer process for microelectromechanical devices , 1992 .
[17] R. S. Payne,et al. A low cost monolithic accelerometer; product/technology update , 1992, 1992 International Technical Digest on Electron Devices Meeting.