Beyond the ensemble average: X-ray microdiffraction analysis of single SiGe islands

C. Mocuta,1 J. Stangl,2 K. Mundboth,1,2 T. H. Metzger,1 G. Bauer,2 I. A. Vartanyants,3 M. Schmidbauer,4 and T. Boeck4 1European Synchrotron Radiation Facility (ESRF), B.P. 220, F-38043 Grenoble Cedex, France 2Institut für Halbleiterund Festkörperphysik, Johannes Kepler Universität Linz, AltenbergerstraBe 69, A-4040 Linz, Austria 3Hasylab at DESY, Notkestr. 85, D-22607 Hamburg, Germany 4Institute for Crystal Growth, Max-Born-StraBe 2, D-12489 Berlin, Germany Received 16 April 2008; published 18 June 2008