Lateral encroachment of Ni-silicides in the source/drain regions on ultrathin silicon-on-insulator
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Mikael Östling | Bengt Gunnar Malm | S.-L. Zhang | Jun Lu | Per-Erik Hellström | M. von Haartman | J. Seger | B. Malm | M. Östling | Jun Lu | P. Hellström | S. Zhang | M. V. Haartman | J. Seger
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