Design and Fabrication of a Plasmonic Gas Sensor

This paper provides a design of nanohole array based plasmonic sensor. Different shapes, sizes, periods and materials of elemental structures in the array are tested by numerical simulation. The results are compared to study how these factors would affect the final performance of the sensor. Period mainly determines the peak oscillating wavelength; size controls the intensity and sharpness of the waveform; shape affects characteristics in a complex way; material (gold and silver) has the smallest effect. A sensor platform employing the nanohole array is then fabricated with optimized shape, size period and material. The sensor is characterized and tested as a chemical gas sensor utilizing an optical measurement scheme.

[1]  H. Haick,et al.  Non-invasive Breath Analysis of Pulmonary Nodules , 2012, Journal of thoracic oncology : official publication of the International Association for the Study of Lung Cancer.

[2]  H. Haick,et al.  Detection of lung, breast, colorectal, and prostate cancers from exhaled breath using a single array of nanosensors , 2010, British Journal of Cancer.

[3]  Gas Sensing with Bare and Graphene-covered Optical Nano-Antenna Structures , 2016, Scientific reports.

[4]  Célia Lourenço,et al.  Breath Analysis in Disease Diagnosis: Methodological Considerations and Applications , 2014, Metabolites.

[5]  Gus Hancock,et al.  Comparison of breath gases, including acetone, with blood glucose and blood ketones in children and adolescents with type 1 diabetes. , 2014, Journal of breath research.

[6]  T. Ebbesen,et al.  Light in tiny holes , 2007, Nature.

[7]  Richard P Van Duyne,et al.  Metal-organic framework thin film for enhanced localized surface plasmon resonance gas sensing. , 2010, Analytical chemistry.

[8]  R. V. Van Duyne,et al.  Localized surface plasmon resonance spectroscopy and sensing. , 2007, Annual review of physical chemistry.

[9]  Jeffrey N. Anker,et al.  Gas sensing with high-resolution localized surface plasmon resonance spectroscopy. , 2010, Journal of the American Chemical Society.

[10]  Mona E. Zaghloul,et al.  UV-assisted alcohol sensing using SnO2 functionalized GaN nanowire devices , 2012 .

[11]  Mona E. Zaghloul,et al.  A monolithic CMOS microhotplate-based gas sensor system , 2002 .