Surface and thickness profile measurement of a transparent film by three-wavelength vertical scanning interferometry.

We have developed a novel areal film thickness and topography measurement method using three-wavelength interferometry. The method simultaneously estimates the profiles of the front and back surfaces and the thickness distribution of a transparent film by model-based separation of two overlapped signals in an interferogram. The validity of the proposed method is demonstrated using computer simulations and actual experiments.

[1]  Daniel Mansfield,et al.  Extraction of film interface surfaces from scanning white light interferometry , 2008, Optical Systems Design.

[2]  Katsuichi Kitagawa.  Fast Surface Profiling by Multi-Wavelength Single-Shot Interferometry , 2010 .

[3]  Hisashi Akiyama,et al.  Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter for measurement of thickness and surface profile of a thin film. , 2005, Optics express.

[4]  Katsuichi Kitagawa.  Simultaneous measurement of film surface topography and thickness variation using white-light interferometry , 2006, SPIE Optics East.

[5]  Roger Fletcher,et al.  A Rapidly Convergent Descent Method for Minimization , 1963, Comput. J..

[6]  Katsuichi Kitagawa.  Thin film thickness profile measurement using an interferometric surface profiler , 2007, International Symposium on Optomechatronic Technologies.

[7]  Soohyun Kim,et al.  Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunablefilter. , 2002, Optics letters.

[8]  S. W. Kim,et al.  Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry. , 1999, Applied optics.

[9]  Katsuichi Kitagawa.  Single-shot surface profiling by multiwavelength interferometry without carrier fringe introduction , 2012, J. Electronic Imaging.

[10]  Katsuichi Kitagawa,et al.  Thin-film thickness profile measurement by three-wavelength interference color analysis. , 2013, Applied optics.

[11]  Peter J. de Groot,et al.  Transparent film profiling and analysis by interference microscopy , 2008 .