论文信息 - Microcircuit Analysis Techniques using Field Effect Liquid Crystals

Microcircuit Analysis Techniques using Field Effect Liquid Crystals

New analysis methods are described which use the nondestructive field effect liquid crystal display (LCD) technique to produce a static optical display of circuit node logic levels associated with selectable digital states of an operating integrated circuit (IC). One method employs special control of the device under test (DUT) and another uses a synchronous, externally applied electric field to produce either a two state comparison display or a single state display. The DUT is operated in a repeating test cycle consisting of a sequence of states for both techniques. Application details are discussed and typical analysis results are presented for a variety of circuit functions and LSI chip technologies.

Daniel J. Burns

[1] Miguel E. Levy. An Investigation of Flaws in Complex CMOS Devices by a Scanning Photoexcitation Technique , 1977, 15th International Reliability Physics Symposium.

[2] L. Hamiter,et al. EBIC - A Valuable Tool for Semiconductor Evaluation and Failure Analysis , 1977, 15th International Reliability Physics Symposium.

[3] Carmine J. Salvo. An Improved Approach to Locating Pinhole Defects in MOS and Bipolar Integrated Circuits Using Liquid Crystals , 1976, 14th International Reliability Physics Symposium.

[4] D. J. Channin,et al. Liquid-crystal technique for observing integrated-circuit operation , 1974 .

[5] B. Piwczyk,et al. Specialized Scanning Electron Microscopy Voltage Contrast Techniques for LSI Failure Analysis , 1974 .

[6] P. Pleshko,et al. Scanning limitations of liquid-crystal displays , 1974 .

[7] M. Schiekel,et al. Deformation of Nematic Liquid Crystals with Vertical Orientation in Electrical Fields , 1971 .

[8] John J. Bart. Scanning Electron Microscopy for Complex Microcircuit Analysis , 1978, 16th International Reliability Physics Symposium.

[9] S. Behera,et al. A Procedure for the Evaluation and Failure Analysis of M.O.S. Memory Circuits using the Scanning Electron Microscope in Potential Contrast Mode , 1972 .