High-Sensitivity Bi-Directional Flow Sensor Based on Biological Inspiration of Animal Haircell Sensors

Artificial haircell (AHC) sensor is presented for highly sensitive flow-field measurements. Design considerations and MEMS process flows are given. Oscillating flow field measurements show sensitivity down to 0.6 mm/s flow rates, steady state flow fields detected down to 0.1 mm/s.

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