论文信息 - Voltage-Induced Material Removal for Electrochemical Mechanical Planarization of Copper in Electrolytes Containing NO3 − , Glycine, and H2O2 - 字舞流文

Voltage-Induced Material Removal for Electrochemical Mechanical Planarization of Copper in Electrolytes Containing NO3 − , Glycine, and H2O2

D. Roy | S. Babu | P. Goonetilleke

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[4] Fiona M. Doyle,et al. The Role of Glycine in the Chemical Mechanical Planarization of Copper , 2002 .