Micromachined low actuation voltage RF MEMS capacitive switches, technology and characterization

In this paper we report the realization and characterization of low-loss, capacitive RF MEMS switches that utilize folded serpentine spring suspensions with large area actuation electrodes. The surface micromachined switches with 1.7 /spl mu/m thick electroplated gold beams are implemented in standard 50 ohm CPW configuration. The electromechanical characterization indicates the measured actuation voltages in the range of 8 - 15 volts. The RF measurements of devices give insertion loss of 0.24 dB and isolation better than 21 dB at 20 GHz.