A New Micro-Cutting Device with High Stiffness and Resolution

Abstract A micro cutting device consisting of a pair of parallel springs and a piezo electric actuator has been developed. With the aid of the finite element method, the device was designed to have a good dynamic response up to 2 kHz with a stiffness of 80 N/μm and an infeed resolution of 5 nm. Submicrometer diamond cutting, controlled by a personal computer, was accomplished by means of the piezo electric element capable of detecting the initial contact between the tool and the cutting surface with an accuracy of ± 0.1 μm.