论文信息 - Optical constants of silicon films deposited by the r.f. glow discharge of SiCl4 - 字舞流文

Optical constants of silicon films deposited by the r.f. glow discharge of SiCl4

G. Fortunato | G. Bruno | F. Evangelisti | P. Capezzuto | F. Cramarossa | V. Augelli | L. Schiavulli | R. Murri