论文信息 - Circuit and silicide impact on the correlation between TLP and ESD (HBM and MM)

Circuit and silicide impact on the correlation between TLP and ESD (HBM and MM)

Transmission line pulse (TLP) measurements have been shown to correlate well with ESD performance in most cases. However, some recent researches suggested in some cases miscorrelation can happen. A test chip was designed and fabricated in TSMC 0.13 /spl mu/m technology to test this correlation. We found that in some conditions, TLP measurements (IT2) do not correlate well with ESD testing in both human body and machine models.

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