Vapor Phase Anti-Stiction Monolayer Coatings for MEMS

Despite the progress in micromachining technology, adhesion and friction remain key issues that limit the realization and reliability of many microdevices. Conventional approaches to abate the deleterious effects adhesion and friction rely on the deposition of organically-based anti-stiction monolayers produced from liquid-phase processes. It has become widely accepted that liquid-phase monolayer processes are less desireable than vaporphase processes, especially for manufacturing purposes. Thus, current research is aimed at the development of vapor-phase anti-stiction processes that yield comparable or better films than their corresponding liquid-phase processes. To date, a variety of monolayer systems that have been well established via liquidphase deposition processes have been adapted to vapor processes. In this review paper, current trends in anti-stiction technology and a discussion of available vapor-phase anti-stiction methods are presented.

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